高可靠性和精度的流量控制器快速的響應時間金屬密封.壓電控制閥.316L不銹鋼材質.5 sccm-100 slm流量技術規格:ModelSEC-4400SEC-4500SEC-4550SEC-4600Standard Flow Range(N2 Eq.)5 sccm ~ 8 slm10 ~ 30 slm31 ~ 50 slm51 ~ 100 slmWetted MaterialsM (metal) -Type: SUS-316L-R (viton) typeValve Piezo Valve(Normal Close or Normal Open)Flow Control Range2 ~ 100% F.S.Accuracy± 1% F.S.Response<1.0sec. (500ms typical)Linearity± 0.5% F.S.Repeatability± 0.2% F.S.Operating Pressure14 ~ 42 psi21 ~ 42 psiLeak IntegrityM-Type: 5x10 -10 Pa?m 3/s(He) or lessOperating Temperature5 ~ 50 °C (Accuracy guaranteed 15 ~ 35 °C)Flow Rate Setting Signal0.1 ~ 5VDCFlow Rate Output Signal0 ~ 5VDCPower Supply± 15VDC ± 5% 60mAStandard Fitting1/4” VCR, 1/4” Swagelok3/8”VCR,3/8”Swagelok